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INTERNATIONAL BUSINESS SERVICES – PLASMA CLEANER/ PLASMA ASHER
Plasma surface activation and plasma surface modification offer many benefits against wet chemical cleaning. A decisive factor of low-pressure plasma cleaner is the generation of free radicals in the gaseous stage that can react with organic contaminations and forms volatile compounds that are easily removed from the chamber by vacuum. The free radicals penetrate through any intricate parts including small gaps resulting in plasma activation with a perfectly cleaned surface. Plasma Asher removes any organic matter into ash by applying gas which usually is oxygen. It removes polymer and masking materials.

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